发明名称 Auto-focus method for a scanning microscope
摘要 An auto-focus method for focusing an optical arrangement of a sub-micron optical system. The optical system includes a head, at least part of the optical arrangement being mechanically connected to the head. The optical arrangement is configured for reading from or writing to a surface of a medium. The head performs a scanning motion relative to the surface. The method includes illuminating at least part of a first viewing region of the surface by the optical arrangement while performing a focus range measurement of a second viewing region of the surface. The method also includes providing relative movement between the medium and the head in order for the optical arrangement to illuminate at least part of the second viewing region. The method additionally includes adjusting the focus of the optical arrangement based upon the focus range measurement.
申请公布号 US6824056(B1) 申请公布日期 2004.11.30
申请号 US20030678060 申请日期 2003.10.06
申请人 ACCRETECH (ISRAEL) LTD. 发明人 KARIN JACOB
分类号 G02B21/00;G02B21/24;(IPC1-7):G06K7/14 主分类号 G02B21/00
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