| 发明名称 |
Flexibly suspended gas distribution manifold for plasma chamber |
| 摘要 |
A method of flexibly mounting a gas distribution plate to the back wall of a gas inlet manifold for a plasma chamber. A perforated gas distribution plate is suspended from the back wall by flexible side walls. The flexible suspension minimizes mechanical stress due to thermal expansion of the gas distribution plate.
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| 申请公布号 |
US6823589(B2) |
申请公布日期 |
2004.11.30 |
| 申请号 |
US20020293544 |
申请日期 |
2002.11.12 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
WHITE JOHN M.;KELLER ERNST;BLONIGAN WENDELL T. |
| 分类号 |
B01J19/08;C23C16/44;C23C16/455;C23C16/509;H01J37/32;H01L21/205;H01L21/302;H01L21/3065;H01L21/31;(IPC1-7):B23P15/00 |
主分类号 |
B01J19/08 |
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