REALTIME MONITORING SYSTEM USING LIGHT SOURCE, TEMPERATURE DETECTION DEVICE AND LIGHT DETECTION DEVICE AND METHOD FOR BONDING PROCESS

摘要

PURPOSE: A high-resolution monitoring system and a method thereof are provided to monitor a bonding state in real time. CONSTITUTION: A high-resolution monitoring system includes a light source(51) for irradiating a laser ray(54) at a sample(55). A heating device(52) applies heat to the sample(55). A temperature detection device is provided to detect a temperature of the sample. A light detection device(59) is provided to detect the light transmitted to the sample in order to change to an image signal. A controller(62) outputs the image signal received from the light detection device and controls the light source(51) and the heating device(52). The light source(51) radiates an X-ray or an ultrasonic wave. The heating device(52) includes one selected from the group consisting of a laser, a heating wire, and a heating plate. The temperature detection device includes a pyrometer or a thermocouple.