发明名称 LOADING TABLE AND INSPECTING DEVICE ACCURATELY AND CERTAINLY DETECTING IMAGE DEFECT OF PRECISE LCD PANEL
摘要 PURPOSE: A loading table and an inspecting device are provided to perform inspection for light receiving of an imaging device with the high reliability and at low cost. CONSTITUTION: A substrate(13A) is provided for loading at least one LCD(Liquid Crystal Display) panel(S1) to be inspected. A light source has a plurality of point light sources, light emitting diodes(18), for illuminating the back of the LCD panel to be inspected. A diffusion plate(19) is installed above the light emitting diodes for diffusing light from the light emitting diodes to apply the diffused light to the back of the LCD panel to be inspected. An LCD inspecting device includes a loading table(13), a pattern generator(25) applying a signal for lighting inspection to the LCD panel, and a CCD(Charge Coupled Device) camera(16) imaging a surface of the LCD panel.
申请公布号 KR20040099159(A) 申请公布日期 2004.11.26
申请号 KR20040034340 申请日期 2004.05.14
申请人 TOKYO ELECTRON LIMITED 发明人 ASAKAWA JIN;AKIYAMA SHUJI
分类号 G01N21/88;G01N21/95;G02F1/13;(IPC1-7):G02F1/13 主分类号 G01N21/88
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