| 摘要 |
PURPOSE: A method for preparing a quartz glass plate is provided, to reduce manufacturing cost by recycling the waste quartz pipe or dome instead of using the expensive quartz material imported. CONSTITUTION: The method comprises the steps of (S103) cutting the waste quartz pipe or dome into a semispherical shape and washing the cut one for 12 hours or more; (S105) baking a graphite where the washed one is be loaded at 1,800-2,000 deg.C for 10 hours or more; (S109) loading the graphite on the center of a circular plate of a quartz glass plate preparation apparatus; (S111) loading the washed waste quartz on the center of the graphite; (S113) loading graphite on the loaded waste quartz; (S115) moving the circular plate to the upper side of a vacuum furnace to allow it to be closely adhered to the lower face and discharging the air stored in the vacuum furnace through a connection pipe to make the vacuum furnace be vacuum state; injecting an inert gas into the furnace; heating the vacuum furnace the temperature to 600 deg.C; heating the furnace to 1,500-1,700 for 1-3 hours to mold the wasted quartz; maintaining the temperature of the furnace to be 1,100-1.300 deg.C for 1 hours with injecting N2 gas after a certain period; maintaining the temperature of the furnace to be 850-950 deg.C for 1 hours with injecting N2 gas after a certain period; maintaining the temperature of the furnace to be 650-750 deg.C for 1 hours with injecting N2 gas after a certain period; maintaining the temperature of the furnace to be 450-550 deg.C for 1 hours with injecting N2 gas after a certain period; maintaining the temperature of the furnace to be 250-350 deg.C for 1 hours with injecting N2 gas after a certain period; maintaining the temperature of the furnace to be 100-200 deg.C for 1 hours with injecting N2 gas after a certain period; and moving the circular plate to the lower part of a supporter and discharging the graphite and the quartz glass plate to the outside when the internal temperature of the furnace is 15-25 deg.C.
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