SEMICONDUCTOR DEVICE WITH CAPACITOR AND FABRICATING METHOD THEREOF TO IMPROVE RELIABILITY OF DIELECTRIC LAYER OF CAPACITOR

摘要

PURPOSE: A semiconductor device with a capacitor is provided to improve reliability of a dielectric layer of a capacitor by reducing a possibility that a leakage current occurs in the dielectric layer. CONSTITUTION: A semiconductor substrate(1) is prepared. A lower electrode(9) of a capacitor has a vertical part formed to extend in an almost vertical direction to the main surface of the semiconductor substrate. The surface of the vertical part is covered with a dielectric layer(10) of the capacitor. In the dielectric layer of the capacitor, a layer thickness(t1) on the upper part of the vertical part is greater than that(t2) on the side surface of the vertical part.