| 摘要 |
PURPOSE: A cassette loading apparatus is provided to selectively load a dummy wafer by installing a dummy wafer slot with a loaded dummy wafer in a loading chamber of a swing bracket or settling a dummy wafer cassette with a loaded dummy wafer in a cassette carrier. CONSTITUTION: A separation plate(4) is fixed to a swing plate of a swing bracket(10) wherein a mounting piece is formed under both sides of the separation plate while protruding to the outside. A cassette settling part(2) is fixed to the swing plate together with the separation plate by forming the mounting piece(7) at both ends of the inside of the cassette carrier(5) as one body with the cassette carrier. A dummy wafer slot(50) is detachably mounted on the inner surface of the swing plate in the swing bracket. A stop block(14) with a stop surface(15) is formed as one body in the inner surface of each side support plate(12) formed at both sides of the swing plate. Stopper mounting surfaces are formed in the end of a side surface plate at both surfaces of a plate of an inner bracket(20) installed in the swing bracket to fix a buffer stopper(29). In an outer bracket(30) installed outside the inner bracket, a coupling piece(32) with a hinge ring(33) is formed in the rear part of both sides of a setting plate(31) having a hole, and a clamp is installed in the upper side of a hinge ring(33) axially coupled to a hinge ring(23) of the inner bracket.
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