| 摘要 |
PROBLEM TO BE SOLVED: To provide a microdimensional measuring method that enables a more precise measurement for a measuring object below the resolving power of an optical microscope. SOLUTION: Using an optical microscope and image sensors, a device under test is imaged and the signal positions of two points a, b corresponding to the predetermined intensity levels are extracted from the obtained picture signals. In the microdimensional measuring device which carries out calculation measurement of the dimension of a device under test based on the position information about these two points, it is characterized by measuring the dimension of a device under test based on the multiplication of the difference of the positions between two points a, b, and the ratio of the maximum luminance c between two points to the maximum luminance used as criteria. COPYRIGHT: (C)2005,JPO&NCIPI
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