MEASURING METHOD OF CERAMIC THICKNESS BY ULTRASONIC DIFFRACTOMETRY

摘要

PROBLEM TO BE SOLVED: To provide a measuring method of ceramic thickness with a ultrasonic diffractometry, capable of measuring a very small film thickness or the total film thickness of a multilayer film composed of multiple films over a wide range. SOLUTION: The measuring method of ceramic thickness is performed as follows: a working curve represents the relation between an ultrasonic diffraction propagation time between transmission and reception probes of a ceramic substrate coated with a ceramic film, and the film thickness is prepared; the ultrasonic diffraction propagation time of the ceramic substrate coated with the ceramic film to be measured by the transmission and reception probe is measured; and the thickness of the ceramic film can be obtained from the working curve by using the diffraction propagation time. COPYRIGHT: (C)2005,JPO&NCIPI