Device and method for optically scanning a substrate disk

摘要

An optical scanning system for a substrate disk has an image recording device and an exposure device. The image recording device scans an object line in an area of recording on the substrate disk. The exposure device comprises a light source and an optical system, whereby the optical system is adapted to direct the light emitted by the light source as a linear exposure area onto the position of the object line and evenly distributed across the entire length of the object line to be recorded.