发明名称 |
Self-calibrating beam profile ellipsometer |
摘要 |
A real-time calibration method for beam profile ellipsometry systems includes projecting an electromagnetic probe beam having a known polarization state though an objective lens onto the surface of a subject and collecting the reflected probe beam using the same objective. The reflected probe beam is then passed through a rotating compensator and analyzer before being received by a detector. A processor performs a harmonic analysis on the detector output to determine normalized Fourier coefficients. The processor uses Fourier coefficients to measure the retardation deltaB and the azimuth angle QB of the objective lens; and uses the retardation deltaB and the azimuth angle QB to identify the ellipsometric effects of the objective lens.
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申请公布号 |
US2004233436(A1) |
申请公布日期 |
2004.11.25 |
申请号 |
US20040782321 |
申请日期 |
2004.02.19 |
申请人 |
WANG HAIMING;FANTON JEFFREY T.;WEI LANHUA |
发明人 |
WANG HAIMING;FANTON JEFFREY T.;WEI LANHUA |
分类号 |
G01J4/00;(IPC1-7):G01J4/00 |
主分类号 |
G01J4/00 |
代理机构 |
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代理人 |
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地址 |
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