Projection linear coding device has light source and transmission grid and photodetector integrated onto a silicon on quartz substrate

摘要

A projection linear coder (1) comprises a light source (2), moving and fixed side grids and a photo-detecting raster (4) on a silicon-on-quartz substrate. A transmission grid (3) is formed by a laminate of opaque films forming a pattern on the substrate and is either on the fixed or moving side grid. An independent claim is also included for a device as above on a silicon-on-glass substrate.