GROUP III-V COMPOUND CRYSTAL AND ITS PRODUCING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a simple and an inexpensive method for producing a group III-V compound crystal by which the good group III-V compound crystal without cracks is obtained even if various substrates are used.

SOLUTION: The method for producing the group III-V compound crystal is comprised of a step to deposit a metal film 2 on a substrate 1, a step to heat-treat the metal film 2 at an atmosphere where a patterning compound exists and a step to grow the group III-V compound crystal 4 on the heat-treated metal film 2. Another method has a step to grow a group III-V compound buffer film on the above heat-treated metal film and a step to grow the group III-V compound crystal on the group III-V compound buffer film after the heat-treating step.

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