METHOD FOR LASER PROCESSING OF INTEGRATED THIN FILM SOLAR BATTERY

摘要

PROBLEM TO BE SOLVED: To provide a laser processing method capable of realizing high productivity at low costs and having excellent stability.

SOLUTION: In the laser processing method to be applied to a separation process in manufacturing of integrated type thin film solar batteries, the separation process is performed by laser light scanning using drive of a galvano mirror 6. At the time, the incident angle of a laser beam irradiating through the galvano mirror 6 to a flexible substrate 2 is set to≤30°with the normal direction of a processing surface of the flexible substrate 2. More preferably, a distance between the projecting position of laser beams on the galvano mirror 6 and the flexible substrate 2 is set to a range≤3,000mm.

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