发明名称 METHOD OF PRODUCING CAM DATA FOR ELECTRONIC CIRCUIT BOARD, CAD/CAM SYSTEM FOR ELECTRONIC CIRCUIT BOARD, COMPUTER PROGRAM USED THEREFOR, AND METHOD OF MANUFACTURING ELECTRONIC CIRCUIT BOARD
摘要 <p><P>PROBLEM TO BE SOLVED: To properly and efficiently convert CAD (computer aided design) data considering the inner diameter of an opening in a solder resist layer into CAM (computer aided manufacturing) data having an inner diameter D' of the opening in a photolithographic exposure mask to form the opening, while preventing problems characteristic to a pad-on-via part. <P>SOLUTION: The inner diameter D' of an opening in a solder resist layer reflected in the CAD data is converted into the outer diameter D<SB>0</SB>of the mask pattern for an opening in a photolithographic exposure mask as the CAM data in order to form the opening in the solder resist layer by photolithographic processes using a photosensitive resin. In the openings formed in the solder resist layer 8, the opening having a metal pad 10' laid as exposed inside the opening and having the metal pad 10' as a pad-on-via part is defined as a first kind of opening 8a', while the opening forming a pad-off-via part is defined as a second kind of opening. The outer diameter D<SB>0</SB>of the mask pattern for an opening is corrected in such a manner that the ratio D<SB>0</SB>/D' of the outer diameter D<SB>0</SB>to the inner diameter D' of the opening becomes larger in the first kind of opening than in the second kind of opening 8a. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p>
申请公布号 JP2004333595(A) 申请公布日期 2004.11.25
申请号 JP20030126004 申请日期 2003.04.30
申请人 NGK SPARK PLUG CO LTD 发明人 ONO TOMOSHIGE;YOKOI KENJI;OHASHI HATSUO
分类号 G03F1/68;H05K3/00;(IPC1-7):G03F1/08 主分类号 G03F1/68
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