| 摘要 |
PROBLEM TO BE SOLVED: To enhance positioning accuracy of a stage by preventing deterioration in position measuring accuracy due to fluctuation of temperature regulated air. SOLUTION: The stage unit comprises an interferometer mounted on the slider side and measuring the position of a slider 5C moving on the surface of a stage lapping plate 5D, and reflectors 9 and 10 secured to the lapping plate side wherein air gap holes 9C and 10C for passing temperature regulated air from the space on the back side of the reflector to the space on the reflective surface side are provided between the lower surface of the reflector and the surface of the lapping plate. COPYRIGHT: (C)2005,JPO&NCIPI |
