| 摘要 |
PROBLEM TO BE SOLVED: To enable a solid light source to be used in an aligner using a light source, such as a mercury lamp being the existing property of a user. SOLUTION: In a method for manufacturing the aligner, a mask is irradiated with light, by using a lighting optical system including a capacitor optical system, and the pattern of the mask is transferred onto a photosensitive substrate. The method includes a solid light source arrangement process (S11) for arranging a plurality of solid light sources at the front-side focus position of the capacitor optical system or a position optically being a conjugate with it, and adjustment processes (S12-S16) for setting the characteristics of the lighting optical system set to be in a first state becoming appropriate to another light source other than the plurality of solid light sources to the characteristics of a second state becoming appropriate by arranging the plurality of solid light sources. COPYRIGHT: (C)2005,JPO&NCIPI |
