发明名称 MASK AND ITS MANUFACTURING METHOD, ELECTROLUMINESCENT DEVICE AND ITS MANUFACTURING METHOD, AND ELECTRONIC EQUIPMENT
摘要 PROBLEM TO BE SOLVED: To provide a mask having a large strength and its manufacturing method, an EL device and its manufacturing method, and an electronic equipment. SOLUTION: The manufacturing method of a mask includes a process of fitting a second substrate 20 having a plurality of through holes on a first substrate 10 having an opening 12. The plurality of through holes 22 are arranged inside the opening 12. The first and the second substrates 10, 20 may be bonded by a anode bonding. The first and the second substrates 10, 20 may be positioned and fitted by a first and a second alignment marks 14, 24. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2004335486(A) 申请公布日期 2004.11.25
申请号 JP20040235367 申请日期 2004.08.12
申请人 SEIKO EPSON CORP 发明人 YOTSUYA SHINICHI
分类号 H05B33/10;C23C14/04;C23C14/24;H01L51/50;H05B33/14;(IPC1-7):H05B33/10 主分类号 H05B33/10
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