| 摘要 |
PROBLEM TO BE SOLVED: To provide an interferometer capable of evaluating the surface shape of a spherical lens at regular pitches to the surface. SOLUTION: Since a light beam at regular pitches on the incident side of an fθlens is irradiated to the spherical surface at angles of regular pitches by using the fθlens as a means for creating spherical waves to irradiate the spherical shape in the interferometer for evaluating the spherical shape, it is possible to acquire shape information at regular pitches to the spherical surface. Therefore, it is possible to acquire highly accurate shape data even in the case of acquiring interference image data by a CCD etc. in which pixels are arranged in a square matrix shape. COPYRIGHT: (C)2005,JPO&NCIPI
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