METHOD FOR FORMING DEPOSITION FILM

摘要

PROBLEM TO BE SOLVED: To provide a method for forming a uniform deposition film, by decreasing fine abnormal growth which occurs in forming many sorts of deposition films used for an electrophotographic photoreceptor or the like with the use of a deposition apparatus having a plurality of gas introduction lines. SOLUTION: This film-forming method comprises introducing a source gas for a deposition film mainly from one gas introduction line and introducing a trace amount of the source gas from the other gas introduction line at the same time. COPYRIGHT: (C)2005,JPO&NCIPI