| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a liquid jetting head preventing a flow path forming substrate constituting a flow path unit from breaking. SOLUTION: There is provided the method for manufacturing the liquid jetting head equipped with: the flow path forming substrate 11 in which a space containing a pressure generating room 19 and an ink storing room 17 is formed; a nozzle plate 10 laminated on one face of the flow path forming substrate 11; and a vibrating plate 12 laminated on the other face of the flow path forming substrate 11. The flow path forming substrate 11 is formed of a single crystal silicon substrate in which an azimuth (110) plane of a crystal plane is the surface. When the flow path forming substrate 11 is etched anisotropically from the (110) plane to form an ink storing room 17 penetrating through from one face of the substrate to the other face, a (111) plane inclining to the (110) plane is made to appear, and a step part 30 extending in the plate face direction of the substrate and in which the nozzle plate 10 side of the inner wall face of the flow path forming substrate is projected inward, is formed on the inner wall face of the ink storing room 17. COPYRIGHT: (C)2006,JPO&NCIPI
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