METHOD FOR DRYING LIQUID FILM AND METHOD FOR MANUFACTURING ORGANIC EL PANEL, ELECTROOPTIC PANEL AND ELECTRONIC EQUIPMENT, AND APPARATUS FOR DRYING LIQUID FILM, ELECTROOPTIC PANEL, ELECTROOPTIC APPARATUS AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a method for drying a liquid film capable of uniforming a thickness distribution.

SOLUTION: (a) The method has a step of forming the liquid film (51) on a substrate (1) and (b) a step of heating the liquid film formed on the above substrate thereby drying the liquid film to form a thin film. The above (b) is carried out so as to differ in a heating temperature at each part of the liquid film so that a film thickness of the thin film becomes uniform. The above (b) can be carried out so as to differ in the heating temperature against each part corresponding to a drying rate at each part of the liquid film. Further, the above (b) can be carried out so as to differ in the heating temperature against each part corresponding to a vapor pressure of a solvent at each part of the liquid film.

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