| 摘要 |
PROBLEM TO BE SOLVED: To inspect various panels and to change the number of sensor elements allotted to one display pixel. SOLUTION: This inspection device is characterized by including stages for receiving display panels to be inspected, a plurality of sensors each comprising a plurality of sensor elements arranged at least in a first direction parallel to the display panels received by the stages, a first moving mechanism for supporting the sensors so that they can individually move in the first direction in an arranged state in the first direction, a second moving mechanism for moving the sensors in a second direction crossing surfaces parallel to the display panels, and a third moving mechanism for moving the sensors in a third direction crossing the first and second directions and parallel to the display panels. COPYRIGHT: (C)2005,JPO&NCIPI
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