MODIFICATION OF SELECTIVITY FOR SENSING FOR NANOSTRUCTURE DEVICE ARRAYS

摘要

An electronic system for selectively detecting and identifying a plurality of chemical or biological species, which comprises an array of nanostructure sensing devices and methods for fabricating the system are disclosed. The methods involve modifiying nanostructures within the devices to have different selectivity for sensing chemical species. Modification can involve chemical, electrochemical, and self-limiting point defect reactions. Reactants for these reactions can be supplied using a bath method or a chemical jet method. Methods for using the system involve comparing signals from devices that have not been exposed to the species of interest with signals from devices that have been exposed to the species of interest. Nanostructure sensing device array structures that can measure and subtract out environmental factors are also disclosed.