SHEET-LIKE PROBE, PROCESS FOR PRODUCING THE SAME AND ITS APPLICATION

摘要

A sheet-like probe in which positional deviation between an electrode structure and an electrode under test due to temperature variation can be prevented surely in burn-in test even when a large area wafer having a diameter of 8 inch or larger or a circuit device where the electrode under test has an extremely small pitch is inspected, and thereby good electrical connection can be sustained stably. Its production process and application are also provided. In the sheet-like probe, a plurality of electrode structures, having surface electrode parts exposed to the surface and rear surface electrode parts exposed to the rear surface while being arranged according to a pattern corresponding to the electrodes being connected, comprise a contact film held by an insulating film of soft resin and a frame plate supporting that contact film.