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发明名称
Vorrichtung zum Herstellen von optoelektronischen Bauelementen
摘要
申请公布号
DE10053543(B4)
申请公布日期
2004.11.25
申请号
DE20001053543
申请日期
2000.10.27
申请人
MUEHLBAUER AG
发明人
TIMM, UWE;OVERMEYER, LUDGER;GJEGERICH, PETER
分类号
G02B7/02;G02B27/62;H01L33/58;H01S5/00;(IPC1-7):H01L33/00;H01L31/023;H01S5/022
主分类号
G02B7/02
代理机构
代理人
主权项
地址
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