MANUFACTURING METHOD OF OPTICAL SWITCH DEVICE

摘要

PROBLEM TO BE SOLVED: To make it possible to manufacture an optical switch device provided with minute millers movable in a high yield state of a nondefective product. SOLUTION: A mirror chip 109 is formed by cutting and dividing a mirror substrate 100 in the state protected by cementing a mount film (1st adhesive film) 106 with an adhesive layer varying in adhesion on the surface formed with the mirrors 105 of the mirror substrate 100, and the mirror chip 109 is removed after reducing the adhesion of the adhesive layer of the mount film 106. COPYRIGHT: (C)2005,JPO&NCIPI