| 摘要 |
PROBLEM TO BE SOLVED: To enable to produce a mechanism device easily and at low cost with superior durability and low electricity consumption. SOLUTION: This mechanism device 1 is provided with an upper part electrode 3 and a lower part electrode 4 formed on an insulated substrate 5. The upper part electrode 3 is provided with a pillar part 8 formed on the insulated substrate 5 with a prescribed distance from the lower part electrode 4, a beam part 9 of which one end is connected to an upper part of the pillar part 8 and the other end is opposed to the lower part electrode 4 with a prescribed distance, and a magnetic material layer 10 formed on the other end, and the center of gravity of the beam part 9 including the magnetic material layer 10 is biased toward the lower part electrode 4 side. COPYRIGHT: (C)2005,JPO&NCIPI
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