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发明名称
Piezoaktor, Verfahren zu dessen Herstellung und dessen Verwendung
摘要
申请公布号
DE10225408(B4)
申请公布日期
2004.11.25
申请号
DE2002125408
申请日期
2002.06.07
申请人
EPCOS AG
发明人
RIEMER, STEFFEN
分类号
H01L41/053;H01L41/083;H02N2/04;(IPC1-7):H02N2/04
主分类号
H01L41/053
代理机构
代理人
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