| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a design method of filter, a filter, a defect inspection method and a defect inspection device capable of reducing the cost and tact time required for a defect inspection, and removing only moire fringes from an input image without losing the characteristic quantity of a defective part. <P>SOLUTION: A first image that is an unevenness defective image free from moire fringes and a second image 22 that is a moire fringes image free from defect are acquired, and their dispersion values P1 and P2 are acquired. By the use of a filter 1 with a parameter (a) temporarily set, third and fourth images 23 and 24 are generated from the first and second images 21 and 22, and their dispersion values P3(a) and P4(a) are acquired. An evaluation value I(a) based on the ratio Q1(a) of dispersion value of the first and third images and the ratio Q2(a) of dispersion value of the second and fourth images is determined. Further, the parameter (a) is changed to perform the fourth to sixth processes. The processing parameter (a) is finally determined based on all the evaluation values I(a). <P>COPYRIGHT: (C)2005,JPO&NCIPI |
