| 摘要 |
PROBLEM TO BE SOLVED: To effectively a realize prescribed chemical treatment by always feeding a liquid to a through hole in the planar object to be treated from one direction and exhausting the same therefrom so as to smoothen the flow of the liquid in the through hole, thus sufficiently performing the feed of the substance to be required. SOLUTION: In the chemical treatment device provided with: a conveyance rail (7); a hanger (5) supported to the conveyance rail so as to freely be moved sideway; and a fixture (6) fitted to the hanger, and where the bored planar object (2) to be treated held to a vertical state by the fixture is sideway conveyed by the hanger. The device is further provided with: a means (24) for almost vertically spaying a treatment liquid to the surface of the planar object to be treated; a means (25) for sucking the treatment liquid so as to be confronted with the spraying means; and conveyance guides (18) arranged between the spraying means and the sucking means and respectively located on the vicinities of both the side of the planar object to be treated. COPYRIGHT: (C)2005,JPO&NCIPI
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