| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for detecting electrostatic capacitance, which senses a surface shape of an object having minute irregularities such as a fingerprint or the like, by detecting the electrostatic capacitance varying in accordance with distances from the surface of the object, and in which operations are carried out stably; unnecessary energy and labor are reduced when manufacturing the device; and a sensor electrode and a dielectric layer arranged on the sensor electrode are formed even on a material other than a single crystal silicon substrate. SOLUTION: The device for detecting the electrostatic capacitance is formed of M separate power supply lines, N separate output lines, arranged in a matrix of M rows×N columns, and electrostatic capacitance detection elements disposed on crossing points of the lines. The electrostatic capacitance detection element is formed of a signal detection element and a signal amplification element. The signal detection element is formed of a capacitance detecting electrode and a capacitance detecting dielectric layer. The signal amplification element is formed of a MIS type thin film semiconductor device for signal amplification, including a gate electrode, a gate insulating layer and a semiconductor layer. COPYRIGHT: (C)2005,JPO&NCIPI
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