摘要 |
In a magnetic transfer master carrier, as a substrate, one having a Young's modulus E (GPa) in the range of 85 to 250 is used. Magnetic transfer is performed under conditions in which 2<=ALPHAED<3>/{P(S2/S1)}<=400 (where the constant alpha=7.37x10<9>) is satisfied, where d (m) is the thickness of the substrate from the bottom face of a recessed portion to the back face, S1 (m<2>) is the total area of the cross sections of the projected portions which are parallel to the plane of the substrate at a height of 50% of Dmax from the bottom face of the recessed portion when the height from the bottom face of the recessed portion to the top face of a projected portion is denoted by Dmax, S2 (m<2>) is the total area of the bottom faces of the recessed portions and the cross sections of the projected portions at the positions of the relevant bottom faces, and P (MPa) is the tight contact pressure between the master carrier and the slave medium at the time of magnetic transfer.
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