| 摘要 |
PROBLEM TO BE SOLVED: To provide a formation method of a liquid repellent film of a nozzle plate which has a superior chemical resistance, is easy to form and prevents a formed coating film from separating easily, and to provide a nozzle plate and an ink-jet printer head. SOLUTION: The nozzle plate 18 is set in the ink-jet printer head 10. In the nozzle plate 18 having a surface of a metal sheet coated with the liquid repellent film 16, a metal base material 28 as the metal sheet is made SUS. An entire surface of SUS as the metal base material 28 is coated with a silicone resin polymerized film by plasma polymerization. The silicone resin polymerized film has the liquid repellency, and worsens the adhesiveness at the time of assembling or the like as it is. Therefore, a surface of the liquid repellent film 16 is changed to SiO<SB>2</SB>so as to apply wettability to parts where bonding is required. COPYRIGHT: (C)2005,JPO&NCIPI
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