| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a high efficiency optical collector for extreme ultraviolet (EUV) source collecting laser plasma EUV rays with high efficiency. <P>SOLUTION: The optical collector 70 of EUV ray source 10 collects EUV rays 78. The optical collector 70 has an elliptic tray shape reflector 72 and rays emitted at the focus 76 of the reflector 72 is collected by the reflector 72 and forwarded to the collecting position 82. A truncated type annular reflector 90 is arranged around the periphery 84 of the tray shape reflector 72 and EUV rays 78 to be lost in other composition case are collected more. The rays 78 reflected by the annular reflector 90 are forwarded to a central axicon reflector 94 arranged in between the focus 76 of the tray shape reflector 72 and the collecting position 82, and changes the direction of the rays 78 reflected by the annular reflector 90 within an collecting angle. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
