| 摘要 |
PROBLEM TO BE SOLVED: To obtain a quartz optical waveguide device which has little polarization dependency and low losses, especially, to obtain an array waveguide grid device. SOLUTION: In the quartz optical waveguide consisting of a lower clad layer, a core, and an upper clad layer formed on a Si-substrate, the lower cladding layer and the upper cladding layer are formed with BPSG film. The lower and upper cladding layers are formed by heat treatment at 800 to 1,000°C, and the sum of the weight concentrations of P-element and B-element added to the film is not lower than 8.8 wt% and not exceeding 15 wt%, and are characterized in that a deviation of transmission center wavelength depending on the polarization of the array waveguide grid device is 0.03 nm or less. COPYRIGHT: (C)2005,JPO&NCIPI |
