| 摘要 |
PROBLEM TO BE SOLVED: To easily change the shape or the size of a vacuum chamber in compliance with user's demand or the like even after the vacuum chamber is installed. SOLUTION: The vacuum chamber 1 is so structured that it can be divided into the rectangular main body 2 of the chamber, triangular side face frames 3a and 3b which are removably joined fast to both side faces of the main body 2 of the chamber with bolts, top plates 5, 9a, and 9b joined to open top surfaces of the main body 2 of the chamber and the side face frames 3a and 3b respectively, and bottom plates 7 joined to open bottom surfaces of the main body 2 of the chamber and the side face frames 3a and 3b, respectively. Due to this structure, the shape or the size of the vacuum chamber can be easily changed in compliance with user's demand or the like. COPYRIGHT: (C)2005,JPO&NCIPI
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