| 摘要 |
An RF device includes a substrate (502) formed of a low temperature co-fired ceramic (LTCC). A cavity structure, such as a conduit (508) can be provided within the substrate with at least one fluid dielectric contained within the cavity structure. The RF device can also include a piezoelectric structure (504) for concurrently applying agitation force to the fluid dielectric in at least two opposing directions. The opposing directions can include substantially all directions normal to an interior surface defining a fluid conduit over a selected length of the fluid conduit.
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