POLARIZATION-OPTIMIZED AXICON SYSTEM, AND AN ILLUMINATING SYSTEM FOR MICROLITHOGRAPHIC PROJECTION SYSTEM HAVING SUCH AN AXICON SYSTEM

摘要

An axicon system (250) which can be used, for example, in an illuminating system for a microlithographic projection exposure apparatus serves the purpose of transforming an entrance light distribution striking its entrance surface (255) into an exit light distribution emerging from its exit surface (258) by radial redistribution of light intensity. It has an optical axis (3), a first axicon element (251) with a first axicon surface (255), and at least one second axicon element (252) with a second axicon surface (258). Furthermore, at least one intermediate surface (256, 257) arranged between the first and the second axicon surface is provided which can likewise be designed as an axicon surface, for example. The distribution of the axicon functionality over a plurality of surfaces permits the design of polarization-maintaining axicon systems.