| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus for drying a coating film which is able to readily determine conditions of drying processes, and steadily form uniform films in a manufacturing site as well as in a development site. SOLUTION: The method for drying a coating film comprises steps of observing the surface of the film, measuring the shape of the film surface or the in-plane deviation distribution of the film thickness, and controlling drying processes based on the result of the previous step. COPYRIGHT: (C)2005,JPO&NCIPI |
