APPARATUS AND METHOD FOR MEASURING THREE-DIMENSIONAL SHAPE

摘要

PROBLEM TO BE SOLVED: To easily and visually recognize a standby state used for determining a measuring section in a three-dimensional shape measuring apparatus. SOLUTION: Laser light emergent from a laser light source 12 forms an irradiation spot in the surface of an object OB via a collimator lens 13 and a galvano mirror 14. The surface of the object OB is linearly scanned with the irradiation spot by the rotation of the galvano mirror 14. Reflected light from the irradiation spot is guided to a line sensor 16 via the galvano mirror 14 and an image forming lens 15 to measure the surface shape of the object OB through the use of the principle of triangulation. The laser light source 12 is intermittently excited at standby mode to make a scanning track by the laser light of a plurality of discrete irradiation spots. The laser light source 12 is continuously excited at measurement to make the scanning track by the laser light of a continuous line. COPYRIGHT: (C)2005,JPO&NCIPI