发明名称 HIGH FREQUENCY VOLTAGE APPLYING SYSTEM, HIGH FREQUENCY VOLTAGE APPLYING METHOD, AND HIGH FREQUENCY VOLTAGE APPLYING PROGRAM
摘要 PROBLEM TO BE SOLVED: To provide a high frequency voltage applying system for applying a high frequency voltage desired by an measuring person to a measured circuit. SOLUTION: The high frequency voltage applying system composed of a signal system having a high frequency probe and a high frequency signal source connected to the probe over a transmission lineand a controller for controller the signal system over a control line comprisesa U/IF unit for receiving the value of a voltage applied to an input terminal of a measured circuit through the tip of the high frequency probe from a measuring person, a coefficient calculator for calculating the intrinsic coefficient of a circuit equivalent to a system covering from the high frequency signal source to the measured circuit, exclusive of an equivalent voltage source from the equivalent circuit, a power value calculator for calculating the value of a power generated by the high frequency signal source, using the calculated intrinsic coefficient and the value of a received voltage, and a generation controller for making the high frequency signal source generate a signal of the calculated power value on a specified frequency. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2004333320(A) 申请公布日期 2004.11.25
申请号 JP20030130151 申请日期 2003.05.08
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 FUKUDA KENJI
分类号 G01R1/06;G01R27/28;G01R31/316;H01L21/66;(IPC1-7):G01R27/28 主分类号 G01R1/06
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