| 摘要 |
A rotary gyroscope includes a base plate, an intermediate structure, including a driven element floating over the base plate as supported by a driving supporter radially extending therefrom, the driven element performing an oscillating motion with respect to a first axis, which is vertical to a center plane thereof, a driving electrode driving the driven element, and a sensing element disposed in the driven element and connected to the driven element by a sensing connector to oscillate together with the driven element and concurrently to perform a sensing motion with respect to a third axis, which is vertical to the first axis and any second axis, which is parallel to a center plane, due to a Coriolis force when an angular velocity is inputted from the second axis, and a cover covering the intermediate structure and having a sensing electrode to detect the sensing motion of the sensing element.
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