发明名称 ELECTRODE FOR SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing method for an electrode for a semiconductor device by which the possibility of short-circuiting with a wire or the like electrically connected to a semiconductor element can be solved and the electrode for the semiconductor device can be manufactured easily. SOLUTION: When the electrode 16 for the semiconductor device mounted on a substrate 10, on which the semiconductor element 12 is loaded, and to which the other tip of the wire 18, in which one tip is connected to the electrode for the element 12, is connected, is manufactured, a silicon piece as a main body forming the electrode 16 for the semiconductor device is dipped in an electroless nickel plating bath, a nickel layer is formed on the whole surface of the silicon piece by an electroless plating, and a gold layer is formed by an electroless gold plating so as to coat the nickel layer. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2004335965(A) 申请公布日期 2004.11.25
申请号 JP20030133336 申请日期 2003.05.12
申请人 SHINKO ELECTRIC IND CO LTD 发明人 YANAGISAWA MAKOTO;MASHINO NAOHIRO
分类号 H01L23/12;H01L23/52;(IPC1-7):H01L23/52 主分类号 H01L23/12
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