| 摘要 |
PROBLEM TO BE SOLVED: To provide a probing tester capable of coping with the electrode size of an IC chip, narrowing of the pitch between electrodes, and diversification of the electrode arrangement pattern, while preventing lowering in probing test efficiency and probe lifetime. SOLUTION: The top end surface of a probe 13 is electrically connected to an electrode 33 via one or more conductive parts 22, by inserting an anisotropic conductive sheet 20, where conductive parts 22 are arranged by a pitch hp smaller than the width pw of the electrode 33 and the diameter nd of the tip surface of the probe 13 in an insulating sheet 21, in between the electrode 33 of the IC chip of an object to be tested and a probe 13. Also, conductive particles 23 are filled into the conductive parts 22 and the diameter of the conductive particles 23 is made smaller than the thickness pt of the electrode 33 and larger than the thickness ct of the oxide film 34 thereon. Thereby, the conductive particles 23 break the oxide film 34; they are collapsed into the electrode 33, without penetrating the electrode 33, and contacted to the electrode 33. COPYRIGHT: (C)2005,JPO&NCIPI
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