APPARATUS AND METHOD FOR MEASURING THREE-DIMENSIONAL SHAPE

摘要

PROBLEM TO BE SOLVED: To easily detect an appropriate measuring position of an object regardless of the shape of the object in a three-dimensional shape measuring apparatus. SOLUTION: Laser light for measurement from a laser light source 32 is reflected by a galvano mirror 34 to form an irradiation spot in the surface of the object OB. The surface of the object OB is linearly scanned with the irradiation spot by the rotation of the galvano mirror 34. Reflected light from the irradiation spot is guided to a line sensor 36 to measure the surface shape of the object OB through the use of the principle of triangulation. Laser light for reference emergent in such a way that the reflected light incident onto the line sensor 36 may intersect with the laser light for measurement at a position on the optical axis of an image forming lens 35 is linearly converted by a cylindrical lens 39 to form a linear irradiation track in the surface of the object OB. The measuring position of the three-dimensional shape measuring apparatus 30 is determined in such a way that the scanning line may be matched with the irradiation track. COPYRIGHT: (C)2005,JPO&NCIPI