| 摘要 |
A projection optical system for projecting an image of a first object onto a second object includes a first imaging optical system that forms a first intermediate image of the first object, and includes a lens, a second imaging optical system that forms a second intermediate image of the first object, and includes a lens and a concave mirror, and a third imaging optical system that forms an image of the first object onto the second object, and includes a lens, wherein the first, second and third imaging optical systems are arranged along an optical path from the first object in this order, and 0.7<|beta1.beta2<<3.0 is met where beta1 is a paraxial magnification of the first imaging optical system, and beta2 is a paraxial magnification of the second imaging optical system.
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