发明名称 Plating device and method
摘要 There is provided a plating device that can easily form a uniform plated film on the surface, to be plated, of a material. The plating device includes: a holder for holding a material with its surface, to be plated, upward and its peripheral portion of the surface, to be plated, sealed; a heated fluid holding section for holding a heated fluid which is allowed to come into contact with the back surface of the material held by the holder to heat the material; and a plating solution supply section for supplying a plating solution to the surface, to be plated, of the material held by the holder.
申请公布号 US2004234696(A1) 申请公布日期 2004.11.25
申请号 US20040482477 申请日期 2004.05.25
申请人 HONGO AKIHISA;WANG XINMING;MATSUDA NAOKI 发明人 HONGO AKIHISA;WANG XINMING;MATSUDA NAOKI
分类号 C23C18/16;H01L21/288;H01L21/768;(IPC1-7):B05D1/18;B05D3/00;B05C3/00 主分类号 C23C18/16
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