| 摘要 |
A special EFEM (2) is installed in front of each of about 12 to 20 manufacturing apparatuses in a bay (in the process) of a semiconductor manufacturing factory or a liquid crystal manufacturing factory. The EFEMs are interconnected through a clean tunnel (1) and continuous traveling single-wafer conveyors (15), thus constituting interconnected EFEMs. A repacking station (3) for packing wafers in a FOUP (12) and picking up a single wafer is provided near a corner of one of the interconnected EFEMs and connected to a bay-to-bay small-batch conveyor (5). In each of the interconnected EFEMs constituting a minimum clean zone, a robot (20) having a hand with wafer-rotating mechanism is disposed so as to position a wafer and to read the bar code on a wafer. Since the robot can transfer a wafer very fast and a single-wafer conveyor conveys more than 1,000 wafers per hour, a production system with little wafer waiting time is realized.
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