SOLENOID VALVE OF SEMICONDUCTOR DEVICE MANUFACTURING EQUIPMENT FOR MAKING ATTACHMENT AND DETACHMENT OF A WAFER FAST BY ADDING ONE CONNECTION TOOL TO THE SOLENOID VALVE AND INJECTING FORCIBLY GAS

摘要

PURPOSE: A solenoid valve of semiconductor device manufacturing equipment is provided to shorten the separation time after transferring a wafer by forming a gas injection port to the solenoid valve. CONSTITUTION: A solenoid valve(200) of a semiconductor device manufacturing equipment changes a path of passages by operation of a spool(32) installed in a housing(30) and comprises a vacuum unit forming a vacuum; first and second paths setting the vacuum; and a gas supply unit(38) for feeding gas separately from the vacuum unit. Accordingly, the gas is injected into the first and second paths by the operation of the spool. The gas supply unit injects the gas into only one of the first and second paths regardless of operation position of the spool. The gas supply unit is operated differently from the vacuum forming motion of the vacuum unit.